Modes of operation
- Focusing and target geometry (gas medium) adjusted to optimize the flux at requested wavelengths
- Single HHG beam/double beam configurations
- Monochromatized (using a grating monochromator or wavelength-selective multilayer optics)/multi-color radiation (as generated, i.e. a combination of high-order harmonics of the laser)
- Employment with synchronized pulses of VIS/IR or X-rays is allowed.
Diagnostics
- EUV spectrometer
- EUV wavefront sensor
- Energy meter.
Parameters of the radiation
|
Wavelength |
5–120 nm |
|
Photons per shot |
few 109–1012 |
|
Dl/l |
up to 10-2 |
|
Divergence |
<2 mrad |
|
Spatial intensity profile |
Gaussian-like |
|
Wavefront |
<l/10 |
|
Duration |
<15fs |
|
Spatial coherence |
full |
|
Polarization |
Lin./Circ./Elliptical |
