HIGH CONTRAST IMAGING FOR METROLOGY APPLICATIONS

We have developed a new method of characterization by light with increased sensitivity. It is based on multiple interaction of the probe beam with the object of interest. The object is self-imaged between the interactions to preserve the spatial information. Our method proved to increase sensitivity for the effect of the object on probe intensity, phase or polarization.

Features

  • Both reflection and transmission setups
  • Applicable to microscopy (imaging), interferometry, holography, profilometry, polarimetry/ellipsometry
  • Classical trade-off between spatial resolution and a field of view

Benefits

  • Simple optical setup, easy to align
  • Increases the effect of the object on the amplitude (intensity), phase and/or polarization of the probe
  • Two or four-fold increase in measurement sensitivity (SNR) using passive optical elements only
  • Applicable to both quantitative and qualitative methods

How does it work?

  • Multiple interactions of the probe with theobject employing object self-imaging.
  • The self-imaging system can consist of a lensand spherical mirror, or an afocal system oflenses and planar mirror.

Results

Four-pass interferometry setup implemented for low density gas-jet characterization. SNR increases with the number of passes.

We offer

Theoretical and experimental know-how and a license to our patent.

Contact

Technology Transfer Office | tto@eli-beams.eu
Mr. Oskar Lazansky | e-mail: oskar. lazansky@eli-beams.eu  | mobile: +420 725 015 339

 

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