HHG Beam Line

A kHz source of ultra-short EUV pulses emitted in a coherent beam with low-divergence.

Modes of operation

  • Focusing and target geometry (gas medium) adjusted to optimize the flux at requested wavelengths
  • Single HHG beam/double beam configurations
  • Monochromatized (using a grating monochromator or wavelength-selective multilayer optics)/multi-color radiation (as generated, i.e. a combination of high-order harmonics of the laser)
  • Employment with synchronized pulses of VIS/IR or X-rays is allowed.

Diagnostics

  • EUV spectrometer
  • EUV wavefront sensor
  • Energy meter.

Parameters of the radiation

Wavelength

5–120 nm

Photons per shot

few 109–1012

Dl/l

up to 10-2

Divergence

<2 mrad

Spatial intensity profile

Gaussian-like

Wavefront

<l/10

Duration

<15fs

Spatial coherence

full

Polarization

Lin./Circ./Elliptical

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